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Integration and fabrication of nano transducers

(with A. Jungen, L. Durrer and C. Hierold)

INTRODUCTION - Carbon Nanotubes (CNTs) and in particular single-walled carbon nanotubes (SWNTs) have shown exceptional electrical and mechanical properties, making them prime candidates for highly integrated electromechanical nanosystems (NEMS). Before such systems will emerge however, fundamental challenges need to be solved, which include first the exploration and characterization of individual unit processes for a reproducible integration of CNTs by local growth or self-assembly into a system.

OBJECTIVES - The first objective of this project is the investigation of an integrated process flow for the embedding of carbon nanotubes (CNTs) into silicon microelectromechanical systems (MEMS). The goals here are to develop, model and repeat the process flow in order to understand the influence of the process parameters. The requirements for batch processing capabilities could be derived subsequently. A second goal is the investigation of the functional performance of a nanotransducer e.g. a force-sensor. Physical effects will be identified and verified through modelling and simulation in order to analyze unique advantages of CNTs.

FIGURE - (a) SEM image of freestanding SWNTs spanned in a circular structure. (b) Schematic illustration of the fabrication (patterning and etching) of double polysilicon (PolySi) tips. (c) SEM image of such a structure with an integrated „selfassembled“ single-walled carbon nanotube (SWNT). TEM image of the very same SWNT, which is proven to be a (17,10) SWNT. (d) Schematic illustration of a (17,10) SWNT, highlighting the selfassembly (growth) of this nanotube starting form CH4. By courtesy of Alain Jungen and Jannik Meyer.

Text from A. Jungen.

[1] Process integration of carbon nanotubes into microelectromechanical systems;
A. Jungen, C. Stampfer, J. Hoetzel, V. Bright and C. Hierold, Sensors and Actuators: A Physical 130-131 588-594 (2006).

[2] The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems;
M. K. Tripp, C. Stampfer, D. C. Miller, T. Helbling, C. F. Herrmann, C. Hierold, K. Gall, S. M. George and V. M. Bright, Sensors and Actuators: A Physical 130-131 419-429 (2006).

[3] Thermography on a suspended microbridge using confocal Raman scattering;
A. Jungen, C. Stampfer and C. Hierold, Appl. Phys. Lett. 88 191901(2006).

[4] A method for enhanced analysis of specific as-grown carbon nanotubes;
A. Jungen, C. Stampfer, L. Durrer, T. Helbling, and C. Hierold, Physica Status Solidi B 243 3138-3141 (2006).

[5] Electrothermal effects at the microscale and their consequences on system design;
A. Jungen, M. Pfenninger, M. Tonteling, C. Stampfer, and C. Hierold, Journal of Micromechanics and Microengineering 16 1633-1638 (2006).

[6] Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems;
S. Bauerdick, C. Stampfer, T. Helbling, A. Linden, and C. Hierold, Journal of Vacuum Science and Technology B 24 3144-3147 (2006).

[7] Amorphous carbon contamination monitoring and process optimization for single-walled carbon nanotube integration;
A. Jungen, C. Stampfer, L. Durrer, T. Helbling, and C. Hierold, Nanotechnology 18 075603 (2007).

[8] Synthesis of single-walled carbon nanotube bridges controlled by support micromachining;
A. Jungen, S. Hofmann, J. Meyer, C. Stampfer, S. Roth, J. Robertson, and C. Hierold, Journal of Micromechanics and Microengineering 17 603-608, (2007).

[9] Progress in carbon nanotube based nanoelectromechanical systems synthesis;
A. Jungen, L. Durrer, C. Stampfer, C. Roman, and C. Hierold, Physica Status Solidi B 244 (11) 4323-4326 (2007).

[10] Flying and Crawling Modes during Surface-Bound Single Wall Carbon Nanotube Growth;
S. Pisana, A. Jungen, C. Zhang, A. M. Blackburn, R. Sharma, F. Cervantes-Sodi, C. Stampfer, C. Ducati, A. C. Ferrari, C. Hierold,
J. Robertson, and S. Hofmann, Journal of Physical Chemistry C, 111 17249-17253, (2007).


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